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Fabrication process of transistor

Choose incorrect fabrication process of n-type MOS transistor.
Oxidation of silicon substrate
Evaporation of field oxide
Etching of field oxide
Deposition of polysilicon
Patterning and etching of polysilicon layer
Etching of gate oxide
Doping of metal to create regions
Evaporation of aluminium
Patterning and etching of metal layer
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